The Growth and Characteristic of Silicon nanowire
碩士 === 國立臺灣大學 === 電子工程學研究所 === 92 === The silicon nanowires (SiNWs) with different diameters of Au nanoparticles as catalyst are grown via vapor-liquid-solid (VLS) mechanism by low pressure chemical vapor deposition (LPCVD) in this thesis. The density of Au nanoparticles as catalyst on the substrate...
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| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/75721878414813610808 |