Electron Beam Lithography Technology and Application on the Mesas to Assist Germanium Quantum-Dots Growth
碩士 === 國立臺灣大學 === 電子工程學研究所 === 92 === In all fields of technology, nano-technology is today’s buzzword. The applications of the nanometer-order technology are needed, for example, in IC processing, optoelectronic devices, DNA researching, and micro machining. Nano-technology can be roughly divided i...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2004
|
Online Access: | http://ndltd.ncl.edu.tw/handle/29647640616798738923 |