Electron Beam Lithography Technology and Application on the Mesas to Assist Germanium Quantum-Dots Growth

碩士 === 國立臺灣大學 === 電子工程學研究所 === 92 === In all fields of technology, nano-technology is today’s buzzword. The applications of the nanometer-order technology are needed, for example, in IC processing, optoelectronic devices, DNA researching, and micro machining. Nano-technology can be roughly divided i...

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Bibliographic Details
Main Authors: Yan-Ju Chen, 陳彥儒
Other Authors: 管傑雄
Format: Others
Language:en_US
Published: 2004
Online Access:http://ndltd.ncl.edu.tw/handle/29647640616798738923