Development of Two Dimensional Multi-Electrode Arrays Chip and System
碩士 === 國立臺灣大學 === 電機工程學研究所 === 92 === In this research, we reported a design and fabrication by using Micro-Electro-Mechanical-System (MEMS) processes of two dimensional planar Multi-Electrode Arrays (MEA) chip and development of measurement system for MEA chip. The MEA chips are fabricated in the...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/28044014439503547400 |