Research on the Vertical Scanning of White-Light Interferometry
碩士 === 國立臺灣大學 === 機械工程學研究所 === 92 === This study aims to establish the 3D profile measurement techniques of white-light interferometry with large vertical and horizontal measuring ranges. The purpose includes a complete investigation of the SIS-1000 (SNU Precision Company) surface profilometer f...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/27921651596661531187 |