Design and Research for High Precision Coplanar Stage
碩士 === 國立臺灣大學 === 機械工程學研究所 === 92 === For the development of micro- and nano-technology, the demand for high-precision-positioning stage become more vital. With many two-dimensional stages, they are composed of two one-dimensional stages. This approach will produce more assembly errors. As a resul...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/75686078723940409096 |