Mechanism and Circuit Design of CMOS Electrostatic Micromotors
碩士 === 國立臺灣大學 === 機械工程學研究所 === 92 === This thesis focuses on designing the mechanical structure and driven circuitry of electrostatic micromotors by utilizing the standard complementary metal-oxide semiconductor (CMOS) process. The pre-process uses 0.35um DPQM (Double Polysilicon Quadric Metal) CMO...
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| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/24229354372995727744 |