Development of a Novel Intelligent Pneumatic-Piezoelectric Hybrid Servo Positioning XY Platform with Large Stroke and Nanometer Precision
碩士 === 國立臺灣科技大學 === 自動化及控制研究所 === 92 === Because of the characteristics of the servo pneumatic system, such as high compressibility of air, high non-linearity and high friction force of cylinder, the positioning accuracy of the conventional servo pneumatic system is restricted within about 0.1 µm....
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/15901404256922179226 |