Design and Development of Small-Angle-Measurement and Angular-Indexing-Measurement System
碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 92 === In this paper, two novel angular measuring systems are developed: (1) The small Angular measuring system. (2) The indexing measuring system. To meet the need of high precision machinery for IC and other related manufacturing industry, high positioning te...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2004
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Online Access: | http://ndltd.ncl.edu.tw/handle/t8h5bw |