New Three-body Microcontact Model for Rough Surfaces and It''s Applications in Mechano-Chemical Polishing and Chemical Mechanical Polishing
碩士 === 國立虎尾科技大學 === 動力機械工程研究所 === 92 === Particles are often presented at contact interfaces. In this paper, a three-body microcontact model for rough surfaces is proposed in order to understand the effects of particles between surfaces on contact characteristics. Both transitional surface-to-surfac...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2004
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Online Access: | http://ndltd.ncl.edu.tw/handle/c5e6v3 |