The Developments of Flexure Hinge Based Stack-Type 5 DOF Nanometer-Scale Stage for a Heavy-Loading Machining Process and a New Nano-Contouring Measurement Technique
碩士 === 國立虎尾科技大學 === 動力機械工程研究所 === 92 === The main research of this paper can be divided into two respects, the first is that development of flexure hinge based stack-type 5 DOF micro-stage for a heavy-loading machining process; the second is that development of a new nano-contouring measurement tech...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/nz8h9d |