Study on the deposition of titanium containing diamond like carbon films by cathodic arc plasma
碩士 === 國立臺北科技大學 === 製造科技研究所 === 92 === In this study, titanium containing diamond like carbon ( Ti-DLC ) films have been deposited onto two different substrates: Si wafer and SUS420 stainless steel, by cathodic arc plasma deposition ( CAPD ) technique. The effects of deposition...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/56872496955706773484 |