TCAD Simulator for S/D Engineering Optimization of Lg-65nm CMOS devices
碩士 === 國立臺北科技大學 === 機電整合研究所 === 92 === Metal-Oxide-Semiconductor Field-Effect Transistors (MOSFET) grown on Silicon wafer play an important role in IC industry today. To improve the circuit density the dimension of the devices must be scaled down. This inevitably causes short channel effe...
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| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/15191640760678838051 |