CMOS Compatible Highly Tunable Contact Mode Capacitor and Inductor
碩士 === 國立臺北科技大學 === 機電整合研究所 === 92 === This thesis presents a highly tunable capacitor and inductor by using CMOS processes and extra post-process techniques of MEMS. Contact mode capacitor and inductor consists voltage-control actuator and stationary electrode, such as capacitor or inductor. The vo...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/30283217850239431379 |