FABRICATION OF WAVEGUIDE DEVICE ON GLASS VIA SF6 DRY-ETCHING TECHNIQUE
碩士 === 大同大學 === 光電工程研究所 === 92 === ABSTRACT In this thesis, the K+-Na+ ion-exchanged technique is used to fabricate waveguide structures on soda-lime glasses. This technique has the advantages such as simple treatment, low loss and low cost, and very well performance for the channel waveguide t...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/84209896762471678548 |