Pulsed Laser Deposition of 0.07Pb(Mn1/3Nb2/3)O3-0.468PbZrO3-0.462PbTiO3 Piezoelectric Ceramics
碩士 === 大同大學 === 材料工程學系(所) === 92 === In this study, the zirconia with addition of Y2O3 4mol%, 3mol%, and 2mol%, were deposited on the silicon (100) wafer by PLD at different deposition temperatures. The structure of the as-deposited film was a cubic phase with (111) and/or (200) preferred orientatio...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/78860953180263725069 |