ANSYS based design of nano-scaled fringe capacitive sensor

碩士 === 國立雲林科技大學 === 機械工程系碩士班 === 92 === In this paper, I used the theory offered by chi-chuan which is design fringe capacitive sensors can analysis nano-scale by ANSYS. I designed a 1.5-ring fringe capacitive sensors to reduce the multi-ring fringe capacitive sensors model simplest and impoved abil...

Full description

Bibliographic Details
Main Authors: gen-yau Chen, 陳亙佑
Other Authors: Dau-Chung Wang
Format: Others
Language:zh-TW
Published: 2004
Online Access:http://ndltd.ncl.edu.tw/handle/89694625150465803153