ANSYS based design of nano-scaled fringe capacitive sensor
碩士 === 國立雲林科技大學 === 機械工程系碩士班 === 92 === In this paper, I used the theory offered by chi-chuan which is design fringe capacitive sensors can analysis nano-scale by ANSYS. I designed a 1.5-ring fringe capacitive sensors to reduce the multi-ring fringe capacitive sensors model simplest and impoved abil...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2004
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Online Access: | http://ndltd.ncl.edu.tw/handle/89694625150465803153 |