AN ADVANCE MULTIPLE-INPUT DUAL-OUTPUT (MIDO) RUN-TO-RUN (R2R) CONTROLLER IMPLEMENTATION FOR CMP PROCESS OF SEMICONDUCTOR MANUFACTURING
碩士 === 元智大學 === 工業工程與管理學系 === 92 === This research presents an optimization-based, multiple-input dual-output Run-to-Run (R2R) controller for chemical mechanical planarization (CMP) process of semiconductor manufacturing. This controller, termed adaptive dual-response optimizing controller (ADROC),...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2004
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/22910986694216971934 |