AN ADVANCE MULTIPLE-INPUT DUAL-OUTPUT (MIDO) RUN-TO-RUN (R2R) CONTROLLER IMPLEMENTATION FOR CMP PROCESS OF SEMICONDUCTOR MANUFACTURING
碩士 === 元智大學 === 工業工程與管理學系 === 92 === This research presents an optimization-based, multiple-input dual-output Run-to-Run (R2R) controller for chemical mechanical planarization (CMP) process of semiconductor manufacturing. This controller, termed adaptive dual-response optimizing controller (ADROC),...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2004
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Online Access: | http://ndltd.ncl.edu.tw/handle/22910986694216971934 |