Development of Run-to-Run Controller for the Multiple-Input Multiple-Output System Using Fuzzy Control Theories
碩士 === 元智大學 === 工業工程與管理學系 === 92 === Run-to-Run control has been extensively applied in semiconductor industry. It has been recognized that these two techniques, statistical process control and engineering process control, can be integrated in prefect harmony to produce more effective tools for proc...
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| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/86717812807205131262 |