| Summary: | 碩士 === 元智大學 === 工業工程與管理學系 === 92 === Run-to-Run control has been extensively applied in semiconductor industry. It has been recognized that these two techniques, statistical process control and engineering process control, can be integrated in prefect harmony to produce more effective tools for process variation reduction. del Castillo (2002) used multivariate EWMA controller to adjust and maintain the dynamic process output on target.
Multivariate fuzzy control is inherently different from conventional multivariate EWMA control. It is designed by fuzzy logic and set concept. As the proposed fuzzy control can structure an appropriate membership function, thus it can be shown more effective than conventional multivariate EWMA control. In this study, fuzzy logic is used to design the multivariate fuzzy controller for MIMO Run-to-Run applications based on min-max-gravity method under Gupta, Kiszka and Trojan (1986)’s MIMO fuzzy system. Under multivariate white noise and IMA (1,1) disturbances, in some specific circumstances the multivariate fuzzy controller can generate stabler control outputs with smaller MSEs than single-MEWMA and double-MEWMA controller.
|
|---|
