Design and Measurement of Concave Grating Spectrometer Chip Based on X-ray Lithography Technique
碩士 === 元智大學 === 電機工程學系 === 92 === The design and measurement of a concave grating spectrometer chip have been studied in this thesis. By using the theory of diffraction grating, we designed the concave grating which has been fabricated on a silicon wafer by x-ray lithography technique....
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/98744425762519073743 |