The study of self-assembled monolayers for etching process applications
碩士 === 國立中正大學 === 化學工程研究所 === 93 === Abstract We propose to develop a cost efficient and general method to create nanoscale molecular features with controlled size, shape, and chemical functionality. The key strategy will be based on the functionalities of self-assembled monolayers (SAMs). For examp...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/01901852123500904948 |