Effects of Sol-Gel Preparation Conditions on the Properties of Sputter-Deposited Indium Tin Oxide Thin Films by Sol-Gel Derived Targets
碩士 === 長庚大學 === 化工與材料工程研究所 === 93 === The objectives of this research are to prepare sol-gel derived ITO targets as well as rf-sputtered ITO thin films and to investigate the effects of the precursor preparation conditions on the characteristics of the sols, the sol-gel derived ITO powders, targets...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/82357438597391346124 |