Wafer Map Analysis by Tornado Model
碩士 === 中華大學 === 電機工程學系碩士班 === 93 === In this thesis, one method for the quantization of the defect pattern in the wafer map has been proposed. By using NBD as x-axis and NCD as y-axis in A-chart, the distribution of defect pattern also has been investigated. And the obtained distribution is very sim...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/28008371048665196319 |