The analysis and fabrication for diaphragm of Electret Silicon Condenser Microphone

碩士 === 中華大學 === 機械與航太工程研究所 === 93 === This paper investigates the mechanical properties of diaphragm of Silicon Condenser Microphone. The sensitivities of microphone are mainly affected by mechanical sensitivity and first resonance frequency of diaphragms, so this research have detailed analysis for...

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Bibliographic Details
Main Authors: WEI-JHY CHEN, 陳維志
Other Authors: MING-SHYUN YEH
Format: Others
Language:zh-TW
Published: 2005
Online Access:http://ndltd.ncl.edu.tw/handle/99309961783463168721