Design of High Quality RF MEMS Switch
碩士 === 正修科技大學 === 電子工程研究所 === 93 === The thesis is focused on the exploration of how to improve the microwave characteristics of RF switch on silicon structure by MEMS technology. A new device cadre improveds microwave conductive issue of microwave loss. The electrode pad structure was constructed w...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/90550806764664231411 |