A Study of nc-Si:H Thin Films Growth by Hot-wire CVD
碩士 === 建國科技大學 === 機電光系統研究所 === 93 === For thin-film-transistor (TFT) addressed liquid-crystal flat-panel displays (LCD’s), a-Si:H TFTs have been widely used.Their advantages include good switching characteristics, large-area deposition capability, reproducibility, and a low-temperature fabrication p...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/87145825364846517400 |