Capacity Planning of Wafer Fabrication with Time Constraint
碩士 === 中原大學 === 工業工程研究所 === 93 === Queue time constraint is one of the important operational management strategies to avoid contamination and copper oxidization in semiconductor manufacturing. Any lot exceeding the queue time constraint needs to be reworked at particular equipment. This leads to an...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/73z8j5 |