Capacity Planning of Wafer Fabrication with Time Constraint
碩士 === 中原大學 === 工業工程研究所 === 93 === Queue time constraint is one of the important operational management strategies to avoid contamination and copper oxidization in semiconductor manufacturing. Any lot exceeding the queue time constraint needs to be reworked at particular equipment. This leads to an...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/73z8j5 |
| Summary: | 碩士 === 中原大學 === 工業工程研究所 === 93 === Queue time constraint is one of the important operational management strategies to avoid contamination and copper oxidization in semiconductor manufacturing. Any lot exceeding the queue time constraint needs to be reworked at particular equipment. This leads to an extra capacity requirement and cost increase. Generally, engineers’ experience is used to determine the maximum queue time in practice. It is insufficient to use static model to solve the problem of queue time constraint, as there are many stochastic factors involved. Current literature makes un-realistic assumptions that are infeasible in real wafer fabs. This research develops a detailed AutoSched simulation mode using data from real fabs. Based on this, experiment design and response surface method are used to study the effect of critical factors on the system throughput and cycle time. Simulation results show that the maximum queue time and the availability of metrology equipment significantly influence both system throughput and cycle time.
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