PLS Based dEWMA Controller for MIMO Semiconductor Processes
碩士 === 中原大學 === 化學工程研究所 === 93 === The modification of the PLS(partial least squares) modeling procedure is developed. It permits incorporation of a dEWMA(double exponentially weighted moving average) control algorithm into the standard run-to-run controller design. This makes it possible to extract...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/frs22q |