Fabrication of Polysilicon Thin-Film Solar Cells Using Hot-Wire Chemical Vapor Deposition
碩士 === 大葉大學 === 電機工程學系碩士班 === 93 === Hot-Wire chemical vapor deposition is a promising technique for deposition of thin amorphous, polycrystalline silicon films for semiconductor device. In this method, deposition species are generated by the decomposition reaction of source gases on the heated meta...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/98q8m6 |