Investigation on the Characteristics of ITO and its Application for GaN-based Light Emitting Diode
碩士 === 大葉大學 === 電機工程學系碩士在職專班 === 93 === In this study, we report on the characteristics and fabrication of Indium tin oxide film by RF magnetron sputtering. Additional, the effects of the processing conditions such as, operation pressure、gas ratio、operation temperature, etc.) on the optical properti...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/56162134946809907683 |