Investigation on the Characteristics of ITO and its Application for GaN-based Light Emitting Diode
碩士 === 大葉大學 === 電機工程學系碩士在職專班 === 93 === In this study, we report on the characteristics and fabrication of Indium tin oxide film by RF magnetron sputtering. Additional, the effects of the processing conditions such as, operation pressure、gas ratio、operation temperature, etc.) on the optical properti...
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2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/56162134946809907683 |
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ndltd-TW-093DYU014420012015-10-13T15:29:17Z http://ndltd.ncl.edu.tw/handle/56162134946809907683 Investigation on the Characteristics of ITO and its Application for GaN-based Light Emitting Diode ITO性質探討與氮化鎵發光二極體之應用 LIN CHENG HUI 林政輝 碩士 大葉大學 電機工程學系碩士在職專班 93 In this study, we report on the characteristics and fabrication of Indium tin oxide film by RF magnetron sputtering. Additional, the effects of the processing conditions such as, operation pressure、gas ratio、operation temperature, etc.) on the optical properties, electrical properties of the thin film are also investigated. The post-deposition annealing has been done for ITO films in air and the effect of annealing temperature on the electrical, optical and structure properties of ITO ohmic contact was studied. 姚品全、韓斌 2005 學位論文 ; thesis 50 zh-TW |
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NDLTD |
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zh-TW |
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Others
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NDLTD |
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碩士 === 大葉大學 === 電機工程學系碩士在職專班 === 93 === In this study, we report on the characteristics and fabrication of Indium tin oxide film by RF magnetron sputtering. Additional, the effects of the processing conditions such as, operation pressure、gas ratio、operation temperature, etc.) on the optical properties, electrical properties of the thin film are also investigated. The post-deposition annealing has been done for ITO films in air and the effect of annealing temperature on the electrical, optical and structure properties of ITO ohmic contact was studied.
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| author2 |
姚品全、韓斌 |
| author_facet |
姚品全、韓斌 LIN CHENG HUI 林政輝 |
| author |
LIN CHENG HUI 林政輝 |
| spellingShingle |
LIN CHENG HUI 林政輝 Investigation on the Characteristics of ITO and its Application for GaN-based Light Emitting Diode |
| author_sort |
LIN CHENG HUI |
| title |
Investigation on the Characteristics of ITO and its Application for GaN-based Light Emitting Diode |
| title_short |
Investigation on the Characteristics of ITO and its Application for GaN-based Light Emitting Diode |
| title_full |
Investigation on the Characteristics of ITO and its Application for GaN-based Light Emitting Diode |
| title_fullStr |
Investigation on the Characteristics of ITO and its Application for GaN-based Light Emitting Diode |
| title_full_unstemmed |
Investigation on the Characteristics of ITO and its Application for GaN-based Light Emitting Diode |
| title_sort |
investigation on the characteristics of ito and its application for gan-based light emitting diode |
| publishDate |
2005 |
| url |
http://ndltd.ncl.edu.tw/handle/56162134946809907683 |
| work_keys_str_mv |
AT linchenghui investigationonthecharacteristicsofitoanditsapplicationforganbasedlightemittingdiode AT línzhènghuī investigationonthecharacteristicsofitoanditsapplicationforganbasedlightemittingdiode AT linchenghui itoxìngzhìtàntǎoyǔdànhuàjiāfāguāngèrjítǐzhīyīngyòng AT línzhènghuī itoxìngzhìtàntǎoyǔdànhuàjiāfāguāngèrjítǐzhīyīngyòng |
| _version_ |
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