The Serpentine Spring Design for Electrostatic Torsional Micromirror Actuator
碩士 === 逢甲大學 === 航空工程所 === 93 === In recent years, Electrostatic Torsional-Micromirror Actuator is one of the major industrial applications and mass productions of the Micro-Electro-Mechanical Systems (MEMS). These products are requested to have the functions of precise light projection, high reflect...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/46256852005199756717 |