Characteristics and Fabrication of Poly-Si TFTs with a Self-Aligned Sidewall Floating Gate
碩士 === 逢甲大學 === 電子工程所 === 93 === Polycrystalline silicon (poly-Si) thin film transistors (TFTs) are widely used as switching devices in active matrix liquid crystal displays (AMLCDs), because of their high carrier mobility compared with amorphous silicon (a-Si). To achieve a ultra large system integ...
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| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/13334206044747592229 |