Mechanical Properties of Surface Coated Single Crystal Silicon Micro-Cantilever Beams
碩士 === 逢甲大學 === 機械工程學所 === 93 === In this thesis, the influence of surface coating on mechanical properties of single crystal silicon (SCS) micro-cantilever beam is studied experimentally and theoretically. Theoretically, flexural strength of beams are analyzed based on ANSYS (Finite Element Method...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/39205656804434199968 |