The Tracking Control of Piezoceramic Actuator for Atomic Force Microscopy
碩士 === 華梵大學 === 機電工程研究所 === 93 === Atomic Force Microscope (AFM) can achieve the nanometer scale of precise image acquisitions with the aids of piezoceramic actuators. However, the tracking control accuracy of piezoceramic actuators is limited due to their inherent hysteresis nonlinearity. A convent...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/19319141807134240842 |