Analysis and Fabrication of a Polymer-based Capacitance Micro/Array Ultrasonic Transducer
碩士 === 國立高雄應用科技大學 === 機械與精密工程研究所 === 93 === This thesis is to fabricate a polymer-based capacitance micro/array ultrasonic transducer by semiconductor technology. The capacitance transducer has a dimension of 10×10 mm2 with 50×90 cells inside. Each cell has a diameter of 120μm, membrane diameter of...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/49797787258224596713 |