| Summary: | 碩士 === 國立高雄應用科技大學 === 機械與精密工程研究所 === 93 === This thesis is to fabricate a polymer-based capacitance micro/array ultrasonic transducer by semiconductor technology. The capacitance transducer has a dimension of 10×10 mm2 with 50×90 cells inside. Each cell has a diameter of 120μm, membrane diameter of 100μm, top electrode diameter of 70μm, membrane thickness of 5 μm, and gravity gap of 5 μm. The transducer is proposed to fabricate by lithography and sacrificial layer methods. The copper is used for sacrificial layer to create cavity. The aluminum is used for electrode. The transducer structure include membrane, rail and protect the electrode on the top of the membrane are made of polymer photoresist SU-8.
There are many benefits for a polymer-based capacitance ultrasonic transducer: simple fabrication process, low material cost, and especially flexible structure. The ultrasonic transducer can be applied in the consumer electronics, biomedicine and many engineering areas.
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