On the manufacture of AlN piezoelectric thin film by pulsed DC Rective sputtering
碩士 === 明志科技大學 === 工程技術研究所 === 94 === The crystal orientation of deposited AlN film is important since the piezoelectric properties of this film are strongly related to its orientation. The aim of this thesis is to deposit highly textured (002) AlN film on (100) Si substrate using pulsed DC reactive...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/96536258882544821316 |