Plasma oxidation and anodic oxidation of aluminum thin films
碩士 === 國立中興大學 === 材料工程學研究所 === 93 === Abstract In this study, Al thin films were oxidized by plasma oxidation and anodic oxidation. The Al films were deposited on polyethylene terephthalate (PET) and Si wafers by DC magnetron sputtering technique. The intensi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/90032933555828805925 |