Adhesion Measurement with Atomic Force Microscope in Liquid
碩士 === 國立中興大學 === 物理學系 === 93 === In this work, silicon masters with various patterns are fabricated by anisotropic etching. And a soft material, poly(dimethylsiloxane), is used to replicate several polymer microstructures from these silicon masters. Scanning electron microscope (SEM) and scanning p...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2005
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Online Access: | http://ndltd.ncl.edu.tw/handle/90171083229666835547 |