Analysis of Wafer Abrasive-Free Polishing Process
碩士 === 國立中興大學 === 機械工程學系 === 93 === Abstract Abrasive-Free Polishing (AFP) , which mainly focuses on avoiding shear marks caused by mechanical abrasion from abrasives during the dynamic polishing process, is a planarization technology which is quite different from ordinary Chemical Mechanical Polish...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/96067357675316129706 |