Design and Fabrication of CMOS Tunable Frequency Resonator
碩士 === 國立中興大學 === 機械工程學系 === 93 === This study investigates fabrication of tunable frequency resonator by use of a 0.35µm 2P4M (double poly quadri-metal) CMOS (complementary metal oxide semiconductor) process and a post-process. Structure of a tunable resonator includes a driving part, a sensing par...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/07368208670276254593 |