Design and Fabrication of Capacitive RF MEMS Switch
碩士 === 國立中興大學 === 精密工程研究所 === 93 === Abstract In this thesis, we present a improvement capacitive RF MEMS shunt switch which presented by Timans in 2001. After improving the design, we analyze and simulate of electricity and mechanical characteristic to this RF MEMS switch. In analysis and simulati...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/94481226052570051015 |