Investigation and Fabrication of High Sensitivity Si-based Condenser Microphone
碩士 === 國立中興大學 === 精密工程研究所 === 93 === This paper presents a high sensitivity silicon condenser microphone with corrugated diaphragm and wafer bonding technique. The residual stress of membrane has been released by corrugated design to improve the mechanical sensitivity of diaphragm and then improve t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/67754392076685716278 |