The Scorecard Application on Cu CMP New Process Release Management and Evaluation
碩士 === 國立成功大學 === 工學院工程管理專班 === 93 === Semi-conductor process technology is advancing promptly unexpected. The new evaluation procedures on wafer production is unlike what it used to be with 0.18μprocess. In the new age of process technology, production yield is eventually influenced by the param...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/17307393649489223211 |