Growth of Zinc Oxide Transparent Conductive Film by RF Magnetron Sputtering
碩士 === 國立成功大學 === 化學工程學系碩博士班 === 93 === Radio-frequency magnetron sputtering method has been employed to deposit Aluminum-doped zinc oxide. The mechanism of doping by incorporating Aluminum in zinc oxide was studied. Besides, attempts have been made to deposit at right condition to get zinc oxide f...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2005
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Online Access: | http://ndltd.ncl.edu.tw/handle/45633610755800844278 |