Growth of Zinc Oxide Transparent Conductive Film by RF Magnetron Sputtering
碩士 === 國立成功大學 === 化學工程學系碩博士班 === 93 === Radio-frequency magnetron sputtering method has been employed to deposit Aluminum-doped zinc oxide. The mechanism of doping by incorporating Aluminum in zinc oxide was studied. Besides, attempts have been made to deposit at right condition to get zinc oxide f...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/45633610755800844278 |