Investigated the property of TiN/ZrN multilayer
碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 93 === We use D.C. unbalanced magnetron sputter to deposit TiN、ZrN single layer first, and find the optimum parameter of single layer from adhesion force and hardness. The optimum parameter of hardness is P1(N2 flow rate 45sccm, Ar flow rate 45sccm, target curren...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64625736455342421150 |