Excimer Laser Micromachining by Adjusting Fluence and Working Distance
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 93 === In this work a method selecting suitable fluences and working distances (defined as the distance from the ablated surface to the projection lens) to generate microgrooves with varying width by a KrF excimer lasers is developed. The selection of the machining...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/03191499572995276539 |